France's LETI
(Laboratoire d'Electronique de Technologie de l'Information) has become one
of the first European sites to install and begin using the world's highest-
resolution, commercially-available scanning/transmission electron (S/TEM)
microscope, the FEI Titan 80-300. This new system yields
powerful sub-Angstrom (atomic scale) imaging and analysis capabilities.
With the sub-Angstrom imaging of the Titan, researchers at LETI will
have a greatly enhanced ability to conduct advanced characterization and
analysis on a wide spectrum of nanoscale semiconductor devices utilizing
new materials and production processes. The Titan will also be used as part
of LETI's UltraView development program that aims to enable rapid
ultra-high resolution results on extracted wafer samples while wafers
remain in the fab. Successful implementation of this solution will allow
better control over advanced processes that should enable semiconductor
manufacturers to improve yields, reduce time-to-market and reduce process
development costs.
The Titan is installed in LETI's new Centre for Innovation in Micro and
Nanotechology (MINATEC). The grand opening of the MINATEC facilities will
take place on June 1. French government officials including President
Jacques Chirac and Prime Minister Dominique de Villepin are expected to
attend the event.
"As one of the most advanced tools of the nano-characterization
platform of MINATEC, the FEI Titan 80-300 is now in operation. It will
allow us to characterize very advanced technologies in microelectronics
(high resolution, chemical analysis and doping imaging by holographic
technique) and to characterize nano-materials developed within our
fundamental research laboratories (carbon nanotubes, quantum wells,
magnetic domain, etc)," explained Philippe Brincard of LETI's
nano-characterization department.
The Titan's platform is highly automated and provides leading-edge
stability, performance and flexibility. The microscope enables deep sub-
Angstrom resolution making way for the highest performance available in
both transmission electron microscopy (TEM) and scanning transmission
electron microscopy (STEM) modes. The Titan's upgradeable design not only
enables larger nanotechnology and national research centers to afford
dedicated aberration corrected TEM technology, it opens the door to
universities and companies with staged funds to position themselves for the
future.
"With its groundbreaking performance, demand for the Titan S/TEM is
coming from multiple markets that we serve," said Peter Frasso, executive
vice president and chief operating officer for FEI. "We are extremely
pleased that LETI, one of the world's leading nanoelectronics research and
development organizations, has selected to work with the Titan in its new
MINATEC facility."
